The world's smallest and lightest class
                   *According to our research
                   6-axis force torque sensor with 3-axis of force & 3-axis of moment Φ9.6 x 9mm MinebeaMitsumi’s miniature 6-axis force torque sensors
Sensing near the target object
              6-axis force torque sensor with 3-axis of force & 3-axis of moment
              MinebeaMitsumi’s miniature 6-axis force torque sensors
Digitization and quantification of sense
              6-axis force torque sensor with 3-axis of force & 3-axis of moment
              MinebeaMitsumi’s miniature 6-axis force torque sensors

MinebeaMitsumi’s
miniature 6-axis force torque sensors

MinebeaMitsumiʼs miniature 6-axis force torque sensor is a 6-axis force torque sensor with 3-axis of force & 3-axis of moment.
Its hybrid structure of a MEMS chip and a metal structure realizes 6-axis detection.
It is extremely small, light and suitable for fingertips of robot hands.

Example of mounted
miniature 6-axis force torque sensors

Miniature 6-axis force torque sensor

  • The world's smallest and lightest

    By utilizing MEMS technology, MinebeaMitsumi’s miniature 6-axis force torque sensors are among the world’s smallest and lightest class*, measuring ⌀9.6 × 9 mm, and can be used in narrow spaces where sensors could not be used before.
    *According to our research

  • Digital output(SPI)

    The sensor has AFE ICs built in its module and produces digital output (SPI). It is more resistant to noise than analog sensors, which enables to acquire accurate data.

  • Error reduction during simultaneous
    input of multiple axes

    Matrix operation (other axis interference components are removed) reduces errors during simultaneous input of multiple axes.
    Correction coefficients used for the operation are stored in internal memories, and users do not have to control the sensor and the correction coefficients.

ContactClick here for specifications and technical
information (sample codes and others),
evaluation kits and inquiries concerning deployment.

Example of use

Miniature 6-axis force torque sensors are a technology that reproduce human senses.
Examples of usage include robot hands, dental and medical devices, and drones.
These sensors are also used in autonomously controlled robot hands at leading manufacturers in Japan.
In addition to the sensor’s push sensation and vibration detection, its compact size and light weight make it suitable
for use in a wide range of fields.

  • Control of a robot hand
  • Dental/medical
  • Inspection process Switch-Operating force inspection Push position detection
  • Checking of lift force, fluid analysis, etc.

Original
flexure element structure Patented (Japanese Patent No. 6940037)

Articulated industrial robots are often used in the automotive manufacturing process.
Consequently, the robots have been large, and the measurement range for the 6-axis force torque sensors used has generally been relatively large at around 100 kg.
However, as the number of robots deployed in the electronics and service fields increases and robots with a rated range of less than 20 kg become more widespread, the applications for force torque sensors are also expanding.
MinebeaMitsumi’s miniature 6-axis force torque sensors using MEMS have achieved a compact size and high ratings through a unique configuration of MEMS and an elastic body, and are used in a wide range of industries and fields.

Flexure element structure

Outline Specifications

Size Diameter x Height
ø9.6mm × 9.0mm
Weight
3.0g
Load rating Force, Moment
40N, 0.4N·m
Load Capacity Force, Moment
200N, 1.8N·m
Effective Resolution Force, Moment
Fx,Fy / Fz: 0.04NRMS/0.06NRMS
Mx,My / Mz: 0.0004N・mRMS/0.0008N・mRMS
Interface
SPI
Power-supply voltage
VDD: 3.8~14V
VDDIO: 1.14~3.6V

Dimensions

Evaluation kit

You can evaluate with our evaluation kit including the sensor,MCU board & application software.
For details, please contact us using the form.

External communication
USB
Size
40m x 40mm
Power supply
USB
No. of connectable sensors
Max. 1piece

External communication
USB/Ethernet
Size
80mm x 115mm
Power supply
USB
No. of connectable sensors
Max. 5pcs

ContactClick here for specifications and technical
information (sample codes and others),
evaluation kits and inquiries concerning deployment.

FAQ

What is the data update rate?
Approx. 0.78 msec.
How minute force can the sensor detect?
Approx. 0.1 N (10 g).
What is the responsiveness?
Max. 2.0 msec.
The time from inputting to outputting the force is calculated by adding physical response and digital processing (latency).
How can the sensor be installed?
Use attachments made of stainless steel or other rigid material on the upside and downside of the sensor with four M1.6 screws to attach it.
The design of the attachments includes some points to note. For details, please refer to the datasheet.
What type of communication is available to connect with external devices?
The sensor produces SPI output.
USB/Ethernet communication is available with our evaluation board.
Sample codes are also available. For details, please contact us using the form.

Contact

Specifications and technical information (sample codes and others),
evaluation kits and inquiries concerning deployment.

    • Evaluation kit
    • Inquiry about a quotation
    • Other inquiries

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